Room-Temperature Deposition of DLC Films by an Ion Beam Method, Reactive Magnetron Sputtering and Pulsed Laser Deposition: Process Design, Film Structure and Film Properties

نویسنده

  • Markus Kahn
چکیده

Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source, Thin Solid Films 517 (2009) 6502. spectroscopy of diamond-like carbon films deposited by an anode layer source, Diamond Relat. Mater. 17 DLC films deposited at room-temperature by reactive magnetron sputtering and by an anode layer source – a comparative study, Relation between structural/topological disorder and mechanical properties of hydrogenated DLC films, nanoscratch behaviour of room-temperature reactive pulsed magnetron sputtered DLC films-correlations with film structure, submitted Application of nitrogen-doped diamond-like carbon films as novel optically transparent electrodes for multi-reflection IR-ATR spectroelectrochemistry, Collaborative effort which generated preliminary data that showed a potential chemical application of nitrogen-doped diamond-like carbon films DLC films deposited at room-temperature by reactive magnetron sputtering and by an anode layer source – Structural and mechanical properties of diamond-like carbon films deposited by an anode layer source, Structural properties of diamond-like carbon films deposited by an anode layer source, 3

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تاریخ انتشار 2010